II. CVD GROWTH OF 3C-SiC ON Si SUBSTRATES
Sources and Permissions(掲載図の出典・許諾情報)
Reproduced Figures in Chapter 2
Fig. 23 — reproduced from Fig. 7 of:
K. Shibahara, S. Nishino, and H. Matsunami,
“Surface-morphology of cubic SiC(100) grown on Si(100) by chemical vapor deposition,”
J. Crystal Growth 78 (1986) 538–544.
Permission granted by the publisher.
The file above is the main part and the file below is the full text.(上は主要部分を読みやすくしたファイル、下のファイルは全文です。)