II. CVD GROWTH OF 3C-SiC ON Si SUBSTRATES
Sources and Permissions(掲載図の出典・許諾情報)
Figs. 23 and 24
Reproduced from Figs. 7 and 8, respectively, in the following article:
K. Shibahara, S. Nishino, and H. Matsunami, “Surface-morphology of cubic SiC(100) grown on Si(100) by chemical vapor deposition,” J. Crystal Growth 78 (1986) 538–544.
© 1986 Elsevier. Reprinted with permission.
The file above is the main part and the file below is the full text.(上は主要部分を読みやすくしたファイル、下のファイルは全文です。)