II. CVD GROWTH OF 3C-SiC ON Si SUBSTRATES
Sources and Permissions（掲載図の出典・許諾情報）
Figs. 23 and 24
Reproduced from Figs. 7 and 8, respectively, in the following article:
K. Shibahara, S. Nishino, and H. Matsunami, “Surface-morphology of cubic SiC(100) grown on Si(100) by chemical vapor deposition,” J. Crystal Growth 78 (1986) 538–544.
© 1986 Elsevier. Reprinted with permission.
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