Dr. Kentaro Shibahara advanced the semiconductor field through his pioneering research and contributions to major international conferences. He passed away in 2011. In recognition of his achievements and contributions, a memorial tribute was held in his honor during the opening ceremony of the Symposium on VLSI Technology that year.1
International Academic Activities
IEDM2 (International Electron Devices Meeting):Program Committee Member, Process Technology Subcommittee (2008–2011) Symposium on VLSI Technology3: Symposia Officer / Program Committee Member / Session Co-Chairperson (2004)
SSDM4 (International Conference on Solid State Devices and Materials): Chair of Area 3 (2004–2007) / Co-Chair (2008) / Editor of the JJAP Special Issue for SSDM 2009 / Editorial Committee Member
IEEE (Institute of Electrical and Electronics Engineers): Senior Member (SM’05) [→ IEEE EDS]
ITRS (International Technology Roadmap for Semiconductors): WG6 PIDS Special Committee Member5
VLSI-TSA(International Symposium on VLSI Technology, Systems, and Applications): Technical Program Committee Member (2006–2011)
IWJT6 (International Workshop on Junction Technology): Advisory / Steering Committee Member
Related materials: Shibahara also contributed to the IWJT 2002 Preface and to JJAP special-issue publications associated with SSDM 2008 and SSDM 2009. [→ Other Publications]
National Academic & Professional Activities (Japan)
JSPS (Japan Society for the Promotion of Science): Member, Committee 165
The Japan Society of Applied Physics (JSAP): Councilor (2008–2011)
The Japan Society of Applied Physics (JSAP), Silicon Technology Division: Secretary (2005–2006)
Research and Development Association for Future Electron Devices (FED): Committee Member7
Memorial tribute: At the opening ceremony of the 2011 Symposium on VLSI Technology, following the opening remarks, Masaaki Niwa, then Chair of the Symposium, spoke about the passing of Kentaro Shibahara and introduced his career, research activities, and his involvement in and contributions to the Symposium. During the tribute, a large photograph of Shibahara was displayed on the screen at the front of the venue. At Niwa’s invitation, all attendees then stood and observed a moment of silence in Shibahara’s memory. The editor of this website was present at the opening ceremony, and this account is based on her recollection of the event. Before the symposium, Professor Hiroyuki Matsunami, upon learning that a tribute to Shibahara was planned, remarked, “That is remarkable. Please be sure to keep a record of it.” His words were relayed to the editor of this website through a professor at Kyoto Institute of Technology. ↩︎
IEDM (International Electron Devices Meeting): One of the leading international conferences in the field of semiconductor devices. As a member of the Process Technology Subcommittee from 2008 to 2011, Shibahara participated in the review and selection of submitted papers and in organizing the technical program. ↩︎
Symposium on VLSI Technology: A major international conference on advanced semiconductor devices and process technologies. Shibahara served as a Program Committee Member, contributing to paper review and program organization, and also took part in conference management as a Symposia Officer. In 2004, he served as Co-Chairperson of Session 5, “Advanced Transistor Technology I.” ↩︎
SSDM: A major international conference in the field of semiconductor devices and materials. Area 3 covered CMOS devices and related process technologies, and its Chair played a leading role in reviewing submitted papers and organizing the technical program. Shibahara served as Chair of Area 3 from 2004 to 2007 and as Co-Chair in 2008. He also co-authored the Foreword to the JJAP Special Issue for SSDM 2008 with Masaaki Kuzuhara and served as Editor of the JJAP Special Issue for SSDM 2009. ↩︎
As a member of Japan’s WG6 PIDS Special Committee and the international PIDS Working Group, Shibahara participated in discussions on future CMOS devices and process technologies and contributed to the development of the ITRS roadmap. ↩︎
IWJT (International Workshop on Junction Technology): An international workshop focusing on junction formation technologies for semiconductor devices, including ion implantation, dopant activation, ultra-shallow junctions, and thermal processing. As an Advisory / Steering Committee Member, Shibahara was involved in the planning and continued development of the workshop and contributed to international research exchange in the field of junction technology. ↩︎
Shibahara served as a member of the “Quantum Functional Devices Technology Trends Survey Committee” (量子機能素子技術動向調査委員会) of the Research and Development Association for Future Electron Devices (FED). ↩︎
